(a) Outlook of Helios NanoLab 600i; (b) Internal structure of the chamber; (c) Diagram of detectors

The Helios Nanolab 600i scanning electron microscopy has the field emitter gun with the landing voltage of 350 V – 30 kV for the electron beam, and the Ga ion gun with the landing voltage of 500 V – 30 kV for the ion beam. The instrument has the electron beam resolution of 0.8 nm at 30 kV (STEM), 0.9 nm at 15 kV, and 1.4 nm at 1 kV. The advanced double beam is used for ultra-resolution imaging. The innovative Elstar TM electron tube is the basis for high resolution imaging of the Helios NanoLab, and Tomahawk FIB ion tube is ensure for rapid, accuracy ion milling. Multiple detectors as Elstar in-lens SE detector (TLD-SE), Elstar in-lens BSE detector (TLD-BSE), Everhart-Thornley SE detector (ETD) and Retractable STEM detector with BF/DF/HAADF segment can ensure the ultraclear imaging in various condition.

The Helios NanoLab 600i SEM is used for high resolution imaging by back scattering electron and secondary electron modes, 3-D reconstruction by taking a series of images as focused ion beam milling and electron gun imaging, and observing sample internal structure by freeze fracture method.

Technical Support: Jianguo Zhang (010-64888419, jianguozhang@moon.ibp.ac.cn)